Trojan SemiPOL ເຄື່ອງບົດປະລິມານຄວາມແມ່ນຍໍາສູງ

Working disk:

Diameter: 8"–10" (203 / 254 mm)

Speed: 0–350 rpm, continuously variable speed

Direction: CW / CCW

Power: 750 W

Factory calibration: Flatness < 2 µm

Sample movement head:

Speed: 0–50 rpm, continuously variable speed

Direction: CW / CCW

Rotation: Yes, with adjustable amplitude

Oscillation: Yes, amplitude and speed are adjustable

Factory calibration: Perpendicularity to the disk < 2 µm; parallelism < 2 µm

Maximum removal: 10 mm

Panel:

Panel: 7-inch touch screen

Product Details

1. 7-inch LCD touch screen panel, displays the removal in real time, the interface is simple and easy to understand, the operation is convenient.

2. 16 sets of process parameters can be saved and edited.

3. Size:8"(Ф203mm) or 10"(Ф254mm), flatness < 2µm.

4. Sample rotation: 0 ~50rpm, disc rotation: 0 ~350rpm, both are continuously viable speed, both can be forward/reverse.

5. Maximum removal: 10mm, resolution: 1um, stable accuracy: ±2µm.

6. The servo drive motor (750 W) provides constant high torgue output stably and permanently with a long service life.

7. Built-in automatic temperature sensing cooling fan to reduce failure rate and increase service life.

8. Large diameter side discharge water outlet, not easy to clog and drain quickly.

9. Pluggable faucet, convenient for cleaning and maintenance of the disk.

Manual