ຮັບສ່ວນຫຼຸດພິເສດຕາມປະລິມານ, ອັບເດດລາຄາຂາຍສົ່ງ ແລະ ການແຈ້ງເຕືອນສິນຄ້າໃໝ່ສົ່ງກົງເຖິງອິນບັອກຂອງທ່ານ.
ໂດຍການສະໝັກສະມາຊິກ, ທ່ານຍອມຮັບ ເງື່ອນໄຂການໃຫ້ບໍລິການ ແລະ ນະໂຍບາຍຄວາມເປັນສ່ວນຕົວ ຂອງພວກເຮົາ.
ເຂົ້າເຖິງຜູ້ຊ່ຽວຊານທີ່ໄດ້ຮັບການຢັ້ງຢືນຂອງພວກເຮົາໂດຍກົງ
Enclosure Dimensions: W x D x H – Footprint: 1405W x 2615D x 1742H mm (55W x 103D x 69H in)
Net Weight: 480 kg (1058 lbs)
Process Module EFEM: 640 kg (1411 lbs)
Effective Footprint –Clearances: Front – 153 mm (6 in), Back – 380 mm (15 in), Left/Right – 775 mm (30.5 in)
Chamber: Maximum Volume: 5.5 liters (338 in³)
Chuck Configurations: 200 mm and 300 mm substrate sizes
Electrodes:
Variable Electrode Configurations: Power-Ground, Ground-Power, Power-Power
Working Area: 305W x 305D mm (12W x 12D in.)
RF Power:
Standard Wattage: 600 W
Frequency: 13.56 MHz
Gas Control:
Available Flow Volumes: 50, 100, or 250 sccm
Maximum Number of MFCs: 3
Control System and Interface
Software Control: EPC with PC-based touchscreen interface
Remote Interface: SMEMA, SECS/GEM
Vacuum Pump: Standard Purged Dry Pump: 16 cfm
Optional Purged Dry Pump: 16 cfm
N2 Purged Pump Flow: 2 slm
