MKS VISION-2000-A RGA ສໍາລັບ ALD & CVD (1-100; 1-200; 1-300 amu)
Mass Range: 1-100, 1-200, or 1-300 amu
Ion Source: High conductance closed ion source
Filaments: Independently replaceable twin Tungsten or Thoria filaments
Mass Filter: Double filter (1-inch "RF only" pre-filter with 4-inch main filter)
Detector: Dual (Faraday and secondary electron multiplier)
Maximum Analyzer Operating Pressure: 1e^-3 Torr at the ion source inlet (standard), higher pressure optional
Minimum Detectable Partial Pressure: <2e^-12 Torr (for total pressures <1e^-4 Torr on baseline inlet)
Mass Stability: Better than ±0.1 amu over 8 hours
Resolution: Better than 10% valley between peaks of equal height throughout the mass range
Operating Temperature: 70°C (controlled to ±1°C)
Weight: 33 lbs. (15 kg) to bolt on process system
Mechanical Support: Optional stands and brackets are available
Pneumatics: 60-80 psig CDA
Electronics Weight on Flange: 1.7 kg
Power Requirements: 88-264 VAC, 47/63 Hz, 600 Watts
Communication: Ethernet, CAT-5e
Shipping Weight: 132 lbs (60 Kg) may vary depending upon backing pump and instrument rack requirements
Compliance: CE, UKCA
ຮັບສ່ວນຫຼຸດພິເສດຕາມປະລິມານ, ອັບເດດລາຄາຂາຍສົ່ງ ແລະ ການແຈ້ງເຕືອນສິນຄ້າໃໝ່ສົ່ງກົງເຖິງອິນບັອກຂອງທ່ານ.
ໂດຍການສະໝັກສະມາຊິກ, ທ່ານຍອມຮັບ ເງື່ອນໄຂການໃຫ້ບໍລິການ ແລະ ນະໂຍບາຍຄວາມເປັນສ່ວນຕົວ ຂອງພວກເຮົາ.
ເຂົ້າເຖິງຜູ້ຊ່ຽວຊານທີ່ໄດ້ຮັບການຢັ້ງຢືນຂອງພວກເຮົາໂດຍກົງ