MKS DLT4B DELTA™ IV 4-zone Flow Controller (500-10000sccm; EtherCAT)
Full Scale Flow Range: 500, 1000, 2000, and 10000 sccm (each channel) (nitrogen equivalent-Q)
Maximum Operating Outlet Pressure: 200 Torr at maximum flow rate through all channels
Maximum Allowable Outlet Pressure Differential: 50 Torr with the same percentage flow through all channels
Normal Operating Pressure Differential: <150 Torr, Except, <450 Torr for 10K/10K
Ratio Control Range: 0, 5 to 100% Full Scale
Ratio Accuracy: ± 2% set point (for percent set points above 10%)
Ratio Repeatability & Reproducibility: ±0.3% of set point
Resolution: 0.02% of channel Full Scale
Zero Temperature Coefficient: 0.05% Full Scale/°C (500 ppm)
Span Temperature Coefficient: <0.08% of Reading/°C (800 ppm)
Typical Settling Time: <3 seconds (typical dependent on downstream conductance matching)
Warm-up Time: 60 minutes
Operating Temperature: 10-40°C
Storage Temperature: -20-65°C
Storage Humidity: 0-95% relative humidity, non-condensing
Temperature Accuracy: +2°C
Temperature Resolution: 0.1°C
Fitting Type: 4 VCR male, non-rotatable
Connector: 5 pin microconnector
Communication: EtherCAT
Compliance: CE
For specific range please check the attachment below!
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