MKS 641B Integrated Gauge Pressure Controller (10 Torr; 10.000 sccm)
Physical:
- Type: 641B Gage Pressure Controller
-Pressure Range: 10 Torr
- Pressure Resolution: <100 msec
-Transducer Over Pressure Limit: 45 psia or 2x Full Scale, whichever is greater
- Flow Rate: 10,000 sccm
Performance:
- Pressure Control:
+ Range: >2 to 100% of Full Scale
+ Accuracy: ±0.2% of Full Scale
+Time Response: <1.0 sec (excluding system time constant)
Electrical:
-Power Required: ±15 VDC ±5%, 200 mA maximum
-Input-Output Signals: 0-5 VDC standard; 0-10 VDC optional
-Connector: 15-pin male type “D”
-Cable Length: 100 ft. (30 m) max.
- Trip Points: Two open-collector transistors
Rated: 250 mA @ 30 VDC
Adjustable: 1 to 100% of Full Scale
Hysteresis: 3% of Full Scale
Indicators: Green LED on when actuated
- Compliance: CE
Mechanical:
- Fitting Type: 0.25 in. tube
- Valve Seat: Viton
- Dimensions: 1.5 x 4.88 x 5.5 in. (38.1 x 124 x 140 mm)
- Weight: 2.54 lbs. (1.15 kg)
Environmental
-Operating Temperature: 0° to 50°C (32° to 122°F)
-Storage Temperature: -20° to 80°C (-4° to 176°F)
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