Brooks Instrument GP200 ຕົວຄວບຄຸມອັດຕາໄຫຼນໍ້າຫນັກອີງຕາມຄວາມດັນທີ່ປິດດ້ວຍແລ້ວດ້ວຍແລ້ວດ້ວຍແລ້ວ Metal Sealed Pressure-based Mass Flow Controllers (3 sccm ~ 50.000 sccm)
Performance
Full Scale Flow Range: 3 sccm to 50,000 sccm F.S. N2 Equivalent
Process Gas Flow Accuracy:
Zero Leak Valve: <±1% S.P. (5 – 100% F.S.); <±0.05% F.S. (0.5 - 5% F.S.)
Metal Seal Valve: <±1% S.P. (5-100% F.S.); <±0.05% F.S. (2-5% F.S.)
Control Range: 0.5 - 100% F.S; 2 - 100% F.S.
Repeatability & Reproducibility:
5-100% = ±0.15% of S.P.; 0.5-5% = ±0.015% of F.S
5-100% = ±0.15% of S.P.; 2-5% = ±0.015% of F.S
Transient Response & Flow Settling Time: 280 ±20 ms Matched Transient Response, for any ascending or descending non-zero setpoint
(Fast Response Option available via Customer Special Request.)
Valve Leak-by: Zero Leak Valve: <0.005% of F.S. of the bin (Bins 42-46); <0.02% of F.S. of the bin (Bins 40-41) (@ 45 psia to VAC
Metal Seal Valve: <0.15% of F.S. of the bin; (@ 45 psia to VAC)
Supply Pressure Insensitivity/Cross-Talk: <±1% S.P. up to 40 psi/sec inlet pressure spike
Steady State Back Pressure Insensitivity: Insensitive to steady state back pressure
Dynamic Back Pressure Insensitivity: Maintains accuracy during disturbance from vacuum to 1200 Torr over a period of 1 sec
Zero Stability: <±0.15% F.S. per year
Temperature Coefficient:
Zero: 0.005% F.S. per °C
Span: 0.05% S.P. per °C
Number of Standard Configurations: Nine (9) standard bin ranges
Dynamic Gas and Range Programmability: Device may be configured via single tool command in less than 1 second or via BEST software with independent USB diagnostic port
Attitude Insensitivity: Insensitive to device orientation after re-zeroing
Ratings:
Operating Temperature Range: 10 – 60°C
Operating Inlet Pressure:
<15 psia for Low Pressure (LP) bins, configurable based on application
15 to 30 psia
25 to 40 psia
35 to 50 psia
45 to 60 psia
Operating Outlet Pressure:
Vacuum to Atmosphere
Up to 1200 Torr for some applications
Differential Pressure Range:
Min: 7 psid typical
Max: up to 50 psid
External Leak Integrity: 1 x 10^-10 atm cc/sec He
Proof Pressure:
100 psia, CT Bin Devices (70 psia for Helium and Helium mixtures on CT Bin Devic)
45 psia, LP Bin Devices
Design Pressure: 150 psia
Burst Pressure: 1000 psia
For more details, see datasheet.
ຮັບສ່ວນຫຼຸດພິເສດຕາມປະລິມານ, ອັບເດດລາຄາຂາຍສົ່ງ ແລະ ການແຈ້ງເຕືອນສິນຄ້າໃໝ່ສົ່ງກົງເຖິງອິນບັອກຂອງທ່ານ.
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