MKS DLT2B DELTA™ II 2-zone 유량비 컨트롤러 (500-10000sccm; 2-CH; EtherCAT)

Full Scale Flow Range: 500/500 sccm, 1000/1000 sccm, 2000/2000 sccm, or 10000/10000 sccm (N2 equivalent)

Maximum Operating Outlet Pressure: 200 torr

Maximum Allowable Outlet Pressure Differential: 50 torr (between Q1 and Q2)

Normal Operating Pressure Differential: <150 torr (<450 torr for 10000/10000) (N2)

Proof Pressure: 1000 psig

Burst Pressure: 1500 psig

Input Flow Range: 5 to 100% of each channel Full Scale rating (N2 equivalent)

Ratio Control Range: 1:1 to 20:1 and 20:1 to 1:1

Ratio Accuracy: 2% of ratio set point

Typical Accuracy: 0.3% of ratio set point

Ratio Repeatability & Reproducibility: 0.02% of channel Full Scale

Zero Temperature Coefficient: 0.05% Full Scale/°C

Span Temperature Coefficient: 0.08% Reading/°C

Typical Settling Time: <2 seconds

Warm-up Time: 30 minutes

Operating Temperature: 10 to 40°C

Storage Temperature: -20 to 65°C

Storage Humidity: 0 to 95% relative humidity, non-condensing

Temperature Display: 0 to 100°C

Temperature Accuracy: ±2°C

Temperature Resolution: 0.1°C

Fitting Type: 4 VCR male (non-rotatable)

Display: 4 digits for value, 4 characters for unit

Weight: 5 lbs. (2.3 kg)

Connector: Digital I/O: 5-pin microconnector (DeviceNet), Analog: 9-pin D male, EtherCAT: 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)

Power Requirements: Digital I/O: 11-25 VDC, Analog: +15 to 24 VDC±5%

Power Consumption: 9 Watts

Communication: Analog, EtherCAT

For specific range please check the attachment below!